Tilt dynamics of an electrostatically actuated microoscillator at a liquid-liquid interface
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We investigate the time-domain tilt response of an electrostatically actuated mechanical microoscillator positioned at a liquid-liquid interface. An analytical model is presented to simulate the microoscillator’s rotational motion inside a microchannel completely ﬁlled with two immiscible liquids. The model considers two coupled ordinary diﬀerential equations; one simulates the mechanical response of the microplate-microbeam assembly making-up the microoscillator and the other provides the behaviour of the electrical charge responsible for the electrostatic moment that tilts the microplate. Results show that remarkable improvements in sampling time and sensitivity can be obtained using a bi-liquid conﬁguration versus its singleliquid counterpart. Therefore, enhanced performance of mechanical microsensors for liquids could be achieved.
- Física